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A Novel Turbomolecular Pump for R&D and Analytical Applications
Author(s) -
Funke Ralf,
Schnacke Ernst,
Voss Gerhard
Publication year - 2015
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201500577
Subject(s) - rotor (electric) , vacuum pump , mechanical engineering , inlet , rotational speed , compression ratio , compression (physics) , flange , mechanics , chemistry , materials science , engineering , physics , composite material , internal combustion engine
Turbomolecular pumps are high‐vacuum pumps which are used both for attaining very low ultimate pressures down to 10 −10 mbar and for handling of high process gas flows up to inlet pressures of 10 −3 mbar. Pumping speed and compression of these pumps essentially depend on the diameter of the inlet flange, on the design and rotational speed of the rotor and the Holweck stage respectively, and on gas type of the gases to be pumped. The development of the novel TURBOVAC i/iX turbomolecular pump by Oerlikon Leybold Vacuum aimed at the realization of high pumping speeds and high compression ratios, especially for light gases. Both the rotor design and the bearing concept were particularly adapted to these requirements, also by using modern computer simulation tools. This design concept has already proven its functionality in R&D and analytical applications.