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Modulare Seminarreihe „Starke Produkte durch dünne Schichten”︁ Innovationen mit Schichttechnologie
Publication year - 2012
Publication title -
vakuum in forschung und praxis
Language(s) - German
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201290044
Subject(s) - chemistry , operating system , humanities , physics , computer science , art

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