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High performance hard carbon coatings (diamond‐like coatings)
Author(s) -
Vetter Jörg,
Ackerman Cyndi,
Meunier Frederic,
Jarry Olivier,
Schumacher Dan,
Erkens Georg
Publication year - 2012
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201200484
Subject(s) - materials science , coating , evaporation , sputter deposition , layer (electronics) , sputtering , cavity magnetron , diamond like carbon , deposition (geology) , carbon fibers , electron beam physical vapor deposition , doping , metal , thin film , physical vapor deposition , metallurgy , composite material , nanotechnology , optoelectronics , composite number , paleontology , physics , sediment , biology , thermodynamics
Different dLc coating types are applied at an industrial scale by sulzer Metco thin Film. The coatings are generated with different coating architecture. Deposition methods are: magnetron sputtering, electron beam evaporation and PA‐cVd. Reactive magnetron sputtering is used to deposit metal containing a‐c:h coatings (a‐c:h:Me), e.g. MAXit W‐ch. Pure a‐c:h coatings as functional top coatings are used for cavidur®, MAXit® AhdLc and special versions of dylyn® coatings. In addition to the pure a‐c:h coatings, doped a‐c:h coatings are also used. The dylyn® family of coatings is comprised of at least one layer a‐c:h:si:O. The dylyn® coatings may be doped with metal (a‐c:h:ti:si:O) to adapt selected properties like electrical conductivity.