High performance hard carbon coatings (diamond‐like coatings) | Zendy

Vetter Jörg | Zendy; Ackerman Cyndi | Zendy; Meunier Frederic | Zendy; Jarry Olivier | Zendy; Schumacher Dan | Zendy; Erkens Georg | Zendy

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High performance hard carbon coatings (diamond‐like coatings)

Author(s) -

Vetter Jörg,

Ackerman Cyndi,

Meunier Frederic,

Jarry Olivier,

Schumacher Dan,

Erkens Georg

Publication year - 2012

Publication title -

vakuum in forschung und praxis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.213

H-Index - 13

eISSN - 1522-2454

pISSN - 0947-076X

DOI - 10.1002/vipr.201200484

Subject(s) - materials science , coating , evaporation , sputter deposition , layer (electronics) , sputtering , cavity magnetron , diamond like carbon , deposition (geology) , carbon fibers , electron beam physical vapor deposition , doping , metal , thin film , physical vapor deposition , metallurgy , composite material , nanotechnology , optoelectronics , composite number , paleontology , physics , sediment , biology , thermodynamics

Different dLc coating types are applied at an industrial scale by sulzer Metco thin Film. The coatings are generated with different coating architecture. Deposition methods are: magnetron sputtering, electron beam evaporation and PA‐cVd. Reactive magnetron sputtering is used to deposit metal containing a‐c:h coatings (a‐c:h:Me), e.g. MAXit W‐ch. Pure a‐c:h coatings as functional top coatings are used for cavidur®, MAXit® AhdLc and special versions of dylyn® coatings. In addition to the pure a‐c:h coatings, doped a‐c:h coatings are also used. The dylyn® family of coatings is comprised of at least one layer a‐c:h:si:O. The dylyn® coatings may be doped with metal (a‐c:h:ti:si:O) to adapt selected properties like electrical conductivity.

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