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Plasma Jet Machining
Author(s) -
Arnold Thomas,
Boehm Georg,
Eichentopf IngaMaria,
Janietz Manuela,
Meister Johannes,
Schindler Axel
Publication year - 2010
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201000423
Subject(s) - figuring , polishing , machining , jet (fluid) , plasma , abrasive , materials science , deposition (geology) , etching (microfabrication) , optics , plasma etching , nanotechnology , metallurgy , engineering , aerospace engineering , physics , geology , paleontology , layer (electronics) , quantum mechanics , sediment
Plasma Jet Machining (PJM) is a surface figuring technology based on atmospheric plasma assisted chemical etching or deposition, respectively. In both cases a sub‐aperture plasma jet source is used combined with a CNC multi‐axes system for the processing of curved surfaces. It is under development for the surface figuring of a variety of optical materials by IOM for about 15 years. PJM is capable to figure deep aspheric or free‐form substrates with high material removal rate and high spatial resolution. Based on chemical reactions between plasma generated radicals and the surface PJM does not introduce any damage to the processed surface and sub‐surface region in contrast to abrasive techniques. Deterministic deposition of SiO x layers and subsequent proportional transfer using ion beams or polishing is another plasma jet based technique for surface figuring that extends the range of machinable materials. The article gives an overview on the current state of PJM development in IOM and shows examples of its application.