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Beschichtungsverfahren: 23 Wechselfeld‐Plasmen
Author(s) -
Schultrich Bernd
Publication year - 2009
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.200990065
Subject(s) - citation , computer science , library science