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Surface chemical analysis of plasma polymer films: How far shines the light today?
Author(s) -
Unger Wolfgang E.S.
Publication year - 2008
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.200800358
Subject(s) - nanotechnology , polymer , plasma , characterization (materials science) , underpinning , materials science , process engineering , comparability , analytical chemistry (journal) , engineering physics , engineering , chemistry , environmental chemistry , composite material , physics , mathematics , civil engineering , quantum mechanics , combinatorics
A survey is given on how a combination of modern methods of surface analysis with appropriate data evaluation procedures can be used to provide a thorough chemical characterization of plasma polymerized organic films often called plasma polymers. Technologically relevant parameters can be monitored versus variation of plasma process parameters and during ageing of the films on air. The level of development of analytical approaches reached during the last ten years opens many options which are useful to be applied in plasma process development, optimization and control. However, in a number of important cases further development of analytical methods is required. Another future challenge is to develop standards with metrological underpinning to reach comparability of measurements in the community.