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Failure analysis and defect review using extended accuracy of the CrossBeam®Technology
Author(s) -
Gnauck Peter
Publication year - 2005
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.200590031
Subject(s) - citation , library science , engineering , computer science , mechanical engineering
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