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Large area deposition of superhard films
Author(s) -
Stucky Thomas,
Baier Urs,
Meyer CarlFriedrich,
Scheibe HansJoachim,
Schultrich Bernd
Publication year - 2005
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.200590025
Subject(s) - deposition (geology) , materials science , vacuum arc , arc (geometry) , amorphous solid , pulsed laser deposition , vacuum deposition , engineering physics , optoelectronics , metallurgy , nanotechnology , thin film , mechanical engineering , engineering , electrical engineering , geology , chemistry , crystallography , paleontology , cathode , sediment
During the 1990s, the Laser‐Arc technology for the deposition of superhard amorphous carbon films (Diamor®) was developed at the Fraunhofer Institute for Material and Beam Technology. This technology has now been scaled up by a factor of 4 compared to existing devices and integrated in an industrial large‐volume vacuum arc coater. Initial results demonstrate the possibility of depositing well adherent Diamor® films with a thickness of more than 2 microns and a hardness above 4000 HV on larger parts and tools. This opens up a wide field of industrial applications.