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Überblick über die Entwicklung von Ionengetterpumpen
Author(s) -
Bonmassar Luca
Publication year - 2005
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.200500238
Subject(s) - ion , range (aeronautics) , development (topology) , engineering , ion pump , materials science , mechanical engineering , engineering physics , chemistry , aerospace engineering , mathematics , organic chemistry , mathematical analysis
The paper reviews the development of ion pumps, their operating principles and describes particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are discussed.