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Vakuumtechnik bei dünnen Schichten
Author(s) -
Oswald D.,
Busch K.
Publication year - 1998
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19980100404
Subject(s) - citation , nanotechnology , philosophy , library science , physics , materials science , computer science