Premium
Masthead
Author(s) -
C. Schmitt,
H. Schmiedel,
H Schopp,
Mikromechanik Und,
Elektronik Biebl,
B Garke,
Robert J. Edelmann,
J Gunzel,
N Plasten Und Kohlenstoff,
Johann Scherle,
G. Leonhardt,
H Barfuo,
T Linharl,
C Gunkel,
N Meissner,
W. Jitschin,
K Nikutta,
Wolfgang Jorisch,
D Oswald,
H. Krüger,
H Pulker,
Richard E. Lamprecht,
K.-T Rie
Publication year - 1996
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Reports
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19960080401
Subject(s) - citation , engineering , physics , computer science , library science