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Author(s) -
Gunnar Wolf,
A Mucha,
Adam B. Schroer,
Durch Schichten,
H.-U Plasmapolymerisation,
S Poll,
J Sellers,
J Pfahler,
Stabilitat Von Hochvakuum-Meorohren,
Karl P. Schmidt,
Ute Bergner,
W. Jitschin
Publication year - 1996
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Reports
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19960080301
Subject(s) - citation , engineering , computer science , physics , library science

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