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Einsatz des Differenzverfahrens zur Gasabgabemessung kleiner metallischer Proben
Author(s) -
Schindler N.,
Schleußner D.,
Edelmann Chr.
Publication year - 1995
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19950070111
Subject(s) - outgassing , analytical chemistry (journal) , chemistry , ionization , chromatography , ion , organic chemistry
A system for the measurement of the outgassing rate using the modified throughput method, the so‐called difference method, was completed by a sample heater to measure the outgassing of small metal samples at elevated temperatures. It was shown that by this modification the limitation of measuring range can be diminished up to two decades. The problems in similar measurement systems using hot filament ionization gauges are discussed in comparison to data acquired with partial pressure gauges.