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Theoretical and experimental investigation of rarefied gas flow in molecular pumps
Author(s) -
Tazioukov F.,
Ossipov P.,
Burmistrov A.
Publication year - 1995
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19950070110
Subject(s) - flow (mathematics) , mechanics , compression (physics) , free molecular flow , data flow model , thermodynamics , materials science , chemistry , physics
The article presents a theoretical model for calculating the gas flow through channels with moving walls in the molecular flow regime. The analytical equations are solved by iteration techniques. The calculated data for the pumping speed and the compression ration of a molecular pump are compared with the experimental results. The agreement between calculated and measured values is good.