Premium
Film deposition by plasma techniques (Schichtabscheidung mit Plasmaverfahren). von K. Konuma, Springer Series on Atoms and Plasmas, Band 10, Berlin: Springer (1992), ca. 250 S., DM 98,‐
Publication year - 1994
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19940060116
Subject(s) - plasma , deposition (geology) , series (stratigraphy) , atomic physics , materials science , engineering physics , physics , nuclear physics , geology , paleontology , sediment