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Trockenlaufende Vakuumpumpen
Author(s) -
Lamprecht Robert
Publication year - 1993
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19930050407
Subject(s) - piston pump , vacuum pump , mechanical engineering , engineering , piston (optics) , semiconductor industry , diaphragm (acoustics) , diaphragm pump , volume (thermodynamics) , electrical engineering , micropump , manufacturing engineering , physics , hydraulic pump , optics , thermodynamics , wavefront , loudspeaker
The demand for dry running vacuum‐pumps from industry, research and development is increased steadily over the last years. Specially the fact of not having oil or pump sealing fluids in the swept volume is important for many sensitive applications in semiconductor and chemical industry. The article describes the most common construction principles which are used frequently. The question why drypumps is discussed as well as the diaphragm pump, piston pump, dry rotary vane pump, roots pump and claw and claw/roots combinations with their advantages and disadvantages. The very new scroll pump gives a new way on dry pumping in the future.