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Die Membranpumpe ‐ Entwicklung und technischer Stand
Author(s) -
Bickert Peter,
Eckle Franz Josef,
Lachenmann Rudolf,
Ruster Gerhard
Publication year - 1993
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19930050307
Subject(s) - diaphragm (acoustics) , vacuum pump , mechanical engineering , diaphragm pump , coating , engineering , materials science , metallurgy , electrical engineering , composite material , loudspeaker , micropump
The modern diaphragm pump has become a proven device for generating coarse and fine vacuum. The article describes disigns and functions of various construction types as well as state‐of‐the art development and manufacturing. Physical and technical demands have resulted in diaphragm pumps with typical ultimate pressures of 70 to 0,1 mbar and a pumping speed of several m 3 /h. As an almost chemically resistant pump, the diaphragm pump is used in the chemical laboratory. Combining a diaphragm pump with an oil‐free, not against atmosphere compressing pump, a contamination‐free pump assembly for (ultra‐)high vacuum is obtained which is well suited for coating technology, vacuum metallurgy and semiconductor industry due to its oilfree operation.