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Zuverlässigkeit von Turbomolekularpumpen
Author(s) -
Ganschow O.,
Eberl W.,
Koci B.,
Lotz H.,
Mädler M.,
Reuschling H.,
Rippl A.
Publication year - 1993
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19930050207
Subject(s) - reliability (semiconductor) , instrumentation (computer programming) , materials science , reliability engineering , engineering , computer science , physics , thermodynamics , programming language , power (physics)
Reliability of turbomolecular pumps today results in mean times to failure in excess of 50 000 h for analytical instrumentation. Methods to investigate potential failure mechanisms, design principles to eliminate them and verification methods to validate the resuits are discussed.