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“Film Deposition by Plasma Techniques” von Mitsuharu Konuma, 224 Seiten, 185 Abbildungen, 30 Tabellen, Springer‐Verlag, Berlin, New York 1992, ISBN 3‐540‐54057‐1(Berlin),ISBN 3‐387‐54057‐1(New York), Preis: DM 98,–
Publication year - 1993
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.19930050115
Subject(s) - engineering physics , materials science , library science , humanities , art , physics , computer science