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Sputtering condition optimization of sputtered IrOx and TiN stimulus electrodes for retinal prosthesis
Author(s) -
Pan YiLi,
Noda Toshihiko,
Sasagawa Kiyotaka,
Tokuda Takashi,
Ohta Jun
Publication year - 2013
Publication title -
ieej transactions on electrical and electronic engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.254
H-Index - 30
eISSN - 1931-4981
pISSN - 1931-4973
DOI - 10.1002/tee.21860
Subject(s) - tin , retinal prosthesis , sputtering , electrode , materials science , electrochemistry , visual prosthesis , atomic force microscopy , optoelectronics , biomedical engineering , retinal , nanotechnology , chemistry , thin film , metallurgy , engineering , biochemistry
We have optimized the sputtering conditions for sputtered IrOx and TiN electrodes for retinal prosthesis. The basic electrochemical characteristics were evaluated by cyclic voltammetry, and the surface morphology was inspected by atomic force microscopy. To measure the charge delivery capacity (CDC), a 300‐µm diameter electrode was formed, a balanced biphasic current pulse was applied, and the voltage response was measured. From the experimental results, the CDCs of IrOx and TiN in the best sputtering conditions were improved by more than 8 and 4 times compared to that of Pt, respectively. © 2013 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.