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Fabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength‐selective switches
Author(s) -
Sakata Tomomi,
Usui Mitsuo,
Uchiyama Shingo,
Shimoyama Nobuhiro,
Kodate Junichi,
Ishii Hiromu,
Matsuura Tohru,
Shimokawa Fusao,
Sato Yasuhiro
Publication year - 2011
Publication title -
ieej transactions on electrical and electronic engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.254
H-Index - 30
eISSN - 1931-4981
pISSN - 1931-4973
DOI - 10.1002/tee.20672
Subject(s) - microelectromechanical systems , fabrication , electrode , interference (communication) , materials science , optoelectronics , interconnection , wavelength , optics , deformable mirror , electrical engineering , engineering , telecommunications , physics , adaptive optics , medicine , channel (broadcasting) , alternative medicine , pathology , quantum mechanics
This article describes the fabrication of a microelectromechanical system (MEMS) mirror array and mirror‐drive electrodes with high‐aspect‐ratio gold walls that reduce electrical interference in a wavelength‐selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, can be fabricated with a high yield by encapsulating the mirrors with an organic film that protects them from process damage. The gold walls with a high‐aspect ratio are formed in the narrow space between adjacent mirror‐drive electrodes by using thick‐multilevel interconnection technology. Because of these walls between adjacent electrodes, each MEMS mirror operates with low electrical interference. © 2011 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.