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MEMS devices: Progress towards practical applications
Author(s) -
Esashi Masayoshi
Publication year - 2009
Publication title -
ieej transactions on electrical and electronic engineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.254
H-Index - 30
eISSN - 1931-4981
pISSN - 1931-4973
DOI - 10.1002/tee.20371
Subject(s) - citation , computer science , microelectromechanical systems , world wide web , information retrieval , physics , quantum mechanics
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