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Pressure sensing by electrical admittance measurement of a comb‐drive actuator
Author(s) -
Ayano Kenjiro,
Hashiguchi Gen
Publication year - 2007
Publication title -
ieej transactions on electrical and electronic engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.254
H-Index - 30
eISSN - 1931-4981
pISSN - 1931-4973
DOI - 10.1002/tee.20178
Subject(s) - computer science , admittance , operations research , electrical engineering , engineering , electrical impedance