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High‐sensitivity surface micromachinable accelerometer using a ferroelectric substrate and its characterization
Author(s) -
Aoyagi Seiji,
Isono Yuichi
Publication year - 2007
Publication title -
ieej transactions on electrical and electronic engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.254
H-Index - 30
eISSN - 1931-4981
pISSN - 1931-4973
DOI - 10.1002/tee.20169
Subject(s) - sensitivity (control systems) , engineering , electronic engineering