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Pressure sensing by electrical admittance measurement of a comb‐drive actuator
Author(s) -
Ayanos Kenjiro,
Hashiguchim Gen
Publication year - 2007
Publication title -
ieej transactions on electrical and electronic engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.254
H-Index - 30
eISSN - 1931-4981
pISSN - 1931-4973
DOI - 10.1002/tee.20158
Subject(s) - actuator , comb drive , amplifier , admittance , diaphragm (acoustics) , acoustics , pressure sensor , materials science , pressure measurement , electrical engineering , atmospheric pressure , engineering , mechanical engineering , physics , vibration , electrical impedance , fabrication , medicine , alternative medicine , cmos , pathology , meteorology
This paper describes a micromachined pressure sensor that senses pressure not by a diaphragm structure but by a resonantly vibrating comb‐drive actuator. The electrical admittance of the comb‐drive actuator was directly measured using a lock‐in amplifier, and its pressure dependence was examined. From the experiment, it was found that the resonant frequency of the comb‐drive actuator gradually drops as the pressure increases. The sensitivity of the comb‐drive actuator as a pressure sensor was 0.34 Hz/MPa at atmospheric pressure and 0.1 Hz/MPa at 0.4 MPa absolute pressure. Copyright © 2007 Institute of Electrical Engineers of Japan© 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.