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Ultrasensitive Molecule Detection Based on Infrared Metamaterial Absorber with Vertical Nanogap
Author(s) -
Hwang Inyong,
Kim Mingyun,
Yu Jaeyeon,
Lee Jihye,
Choi JunHyuk,
Park Su A.,
Chang Won Seok,
Lee Jongwon,
Jung JooYun
Publication year - 2021
Publication title -
small methods
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 4.66
H-Index - 46
ISSN - 2366-9608
DOI - 10.1002/smtd.202100277
Subject(s) - materials science , metamaterial , spectroscopy , nanotechnology , optoelectronics , monolayer , infrared spectroscopy , etching (microfabrication) , nanoimprint lithography , fabrication , chemistry , medicine , physics , alternative medicine , organic chemistry , layer (electronics) , quantum mechanics , pathology
Surface‐enhanced infrared absorption (SEIRA) spectroscopy is a powerful methodology for sensing and identifying small quantities of analyte molecules via coupling between molecular vibrations and an enhanced near‐field induced in engineered structures. A metamaterial absorber (MA) is proposed as an efficient SEIRA platform; however, its efficiency is limited because it requires the appropriate insulator thickness and has a limited accessible area for sensing. SEIRA spectroscopy is proposed using an MA with a 10 nm thick vertical nanogap, and a record‐high reflection difference SEIRA signal of 36% is experimentally achieved using a 1‐octadecanethiol monolayer target molecule. Theoretical and experimental comparative studies are conducted using MAs with three different vertical nanogaps. The MAs with a vertical nanogap are processed using nanoimprint lithography and isotropic dry etching, which allow cost‐effective large‐area patterning and mass production. The proposed structure may provide promising routes for ultrasensitive sensing and detection applications.