Premium
From Precursor Chemistry to Gas Sensors: Plasma‐Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
Author(s) -
Mai Lukas,
Mitschker Felix,
Bock Claudia,
Niesen Alessia,
Ciftyurek Engin,
Rogalla Detlef,
Mickler Johannes,
Erig Matthias,
Li Zheshen,
Awakowicz Peter,
Schierbaum Klaus,
Devi Anjana
Publication year - 2020
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201907506
Subject(s) - atomic layer deposition , zinc , stoichiometry , deposition (geology) , materials science , thin film , polyethylene terephthalate , chemical engineering , oxygen , layer (electronics) , oxide , inorganic chemistry , nanotechnology , chemistry , organic chemistry , metallurgy , composite material , paleontology , sediment , engineering , biology
The identification of bis‐3‐( N,N ‐dimethylamino)propyl zinc ([Zn(DMP) 2 ], BDMPZ) as a safe and potential alternative to the highly pyrophoric diethyl zinc (DEZ) as atomic layer deposition (ALD) precursor for ZnO thin films is reported. Owing to the intramolecular stabilization, BDMPZ is a thermally stable, volatile, nonpyrophoric solid compound, however, it possesses a high reactivity due to the presence of Zn‐C and Zn‐N bonds in this complex. Employing this precursor, a new oxygen plasma enhanced (PE)ALD process in the deposition temperature range of 60 and 160 °C is developed. The resulting ZnO thin films are uniform, smooth, stoichiometric, and highly transparent. The deposition on polyethylene terephthalate (PET) at 60 °C results in dense and compact ZnO layers for a thickness as low as 7.5 nm with encouraging oxygen transmission rates (OTR) compared to the bare PET substrates. As a representative application of the ZnO layers, the gas sensing properties are investigated. A high response toward NO 2 is observed without cross‐sensitivities against NH 3 and CO. Thus, the new PEALD process employing BDMPZ has the potential to be a safe substitute to the commonly used DEZ processes.