Premium
Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates
Author(s) -
Azoulay Rotem,
Shomrat Neta,
Weisbord Inbal,
Atiya Galit,
SegalPeretz Tamar
Publication year - 2019
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201904657
Subject(s) - materials science , nanorod , heterojunction , nanostructure , fabrication , nanotechnology , copolymer , nanolithography , scanning transmission electron microscopy , template , chemical engineering , oxide , transmission electron microscopy , polymer , optoelectronics , composite material , metallurgy , medicine , alternative medicine , pathology , engineering
Nanofabrication is continuously searching for new methodologies to fabricate 3D nanostructures with 3D control over their chemical composition. A new approach for heterostructure nanorod array fabrication through spatially controlled–growth of multiple metal oxides within block copolymer (BCP) templates is presented. Selective growth of metal oxides within the cylindrical polymer domains of polystyrene‐ block ‐poly methyl methacrylate is performed using sequential infiltration synthesis (SIS). Tuning the diffusion of trimethyl aluminum and diethyl zinc organometallic precursors in the BCP film directs the growth of AlO x and ZnO to different locations within the cylindrical BCP domains, in a single SIS process. BCP removal yields an AlO x ‐ZnO heterostructure nanorods array, as corroborated by 3D characterization with scanning transmission electron microscopy (STEM) tomography and a combination of STEM and energy‐dispersive X‐ray spectroscopy tomography. The strategy presented here will open up new routes for complex 3D nanostructure fabrication.