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Wafer‐Scale Fabrication of Suspended Single‐Walled Carbon Nanotube Arrays by Silver Liquid Dynamics
Author(s) -
Zhang Jian,
Liu Siyu,
Nshimiyimana Jean Pierre,
Deng Ya,
Hou Gu,
Chi Xiannian,
Hu Xiao,
Zhang Zongzhi,
Wu Pei,
Wang Gongtang,
Chu Weiguo,
Sun Lianfeng
Publication year - 2017
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201701218
Subject(s) - materials science , fabrication , carbon nanotube , nanotechnology , wafer , substrate (aquarium) , annealing (glass) , nanoscopic scale , field effect transistor , optoelectronics , transistor , composite material , electrical engineering , medicine , oceanography , alternative medicine , geology , engineering , pathology , voltage
Suspended single‐walled carbon nanotubes (SWNTs) have advantages in mechanical resonators and highly sensitive sensors. Large‐scale fabrication of suspended SWNTs array devices and uniformity among SWNTs devices remain a great challenge. This study demonstrates an effective, fast, and wafer‐scale technique to fabricate suspended SWNT arrays, which is based on a dynamic motion of silver liquid to suspend and align the SWNTs between the prefabricated palladium electrodes in high temperature annealing treatment. Suspended, strained, and aligned SWNTs are synthesized on a 2 × 2 cm 2 substrate with an average density of 10 tubes per micrometer. Under the optimal conditions, almost all SWNTs become suspended. A promising formation model of suspended SWNTs is established. The Kelvin four‐terminal resistance measurement shows that these SWNT array devices have extreme low contact resistance. Meanwhile, the suspended SWNT array field effect transistors are fabricated by selective etching of metallic SWNTs using electrical breakdown. This method of large‐scale fabrication of suspended architectures pushes the study of nanoscale materials into a new stage related to the electrical physics and industrial applications.