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Templated Solid‐State Dewetting of Thin Silicon Films
Author(s) -
Naffouti Meher,
David Thomas,
Benkouider Abdelmalek,
Favre Luc,
Delobbe Anne,
Ronda Antoine,
Berbezier Isabelle,
Abbarchi Marco
Publication year - 2016
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201601744
Subject(s) - dewetting , materials science , micrometer , nucleation , silicon , nanotechnology , fabrication , thin film , optoelectronics , optics , chemistry , physics , medicine , alternative medicine , organic chemistry , pathology
Thin film dewetting can be efficiently exploited for the implementation of functionalized surfaces over very large scales. Although the formation of sub‐micrometer sized crystals via solid‐state dewetting represents a viable method for the fabrication of quantum dots and optical meta‐surfaces, there are several limitations related to the intrinsic features of dewetting in a crystalline medium. Disordered spatial organization, size, and shape fluctuations are relevant issues not properly addressed so far. This study reports on the deterministic nucleation and precise positioning of Si‐ and SiGe‐based nanocrystals by templated solid‐state dewetting of thin silicon films. The dewetting dynamics is guided by pattern size and shape taking full control over number, size, shape, and relative position of the particles (islands dimensions and relative distances are in the hundreds nm range and fluctuate ≈11% for the volumes and ≈5% for the positioning).