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High‐Performance and Tailorable Pressure Sensor Based on Ultrathin Conductive Polymer Film
Author(s) -
Shao Qi,
Niu Zhiqiang,
Hirtz Michael,
Jiang Lin,
Liu Yuanjun,
Wang Zhaohui,
Chen Xiaodong
Publication year - 2014
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201303601
Subject(s) - pressure sensor , electrical conductor , materials science , conductive polymer , polymer , nanotechnology , limit (mathematics) , computer science , sensitivity (control systems) , optoelectronics , mechanical engineering , composite material , electronic engineering , engineering , mathematical analysis , mathematics
A highly sensitive and tailorable pressure sensor is designed based on the variation of contact resistance between an Au covered micropillar array and a conductive polymer film. The sensitivity of such pressure sensors can be tuned from 0.03 kPa −1 to 17 kPa −1 at pressures less than 1 kPa, and a limit of detection of 2 Pa has been demonstrated.
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