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Oxidation Sharpening, Template Stripping, and Passivation of Ultra‐Sharp Metallic Pyramids and Wedges
Author(s) -
Im Hyungsoon,
Oh SangHyun
Publication year - 2014
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201301475
Subject(s) - passivation , materials science , wafer , sharpening , template , metal , silicon , stripping (fiber) , layer (electronics) , nanotechnology , optoelectronics , composite material , metallurgy , computer science , computer vision
Ultra‐sharp metallic pyramids and wedges with tunable tip angles and 5‐nm tip radii are replicated from oxidation‐sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al 2 O 3 shells can protect these sharp pyramidal tips for subsequent usage in near‐field imaging.