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Plow and Ridge Nanofabrication
Author(s) -
Shim Wooyoung,
Brown Keith A.,
Zhou Xiaozhu,
Rasin Boris,
Liao Xing,
Schmucker Abrin L.,
Mirkin Chad A.
Publication year - 2013
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201203014
Subject(s) - nanolithography , nanotechnology , computer science , ridge , lithography , materials science , geology , optoelectronics , fabrication , alternative medicine , medicine , paleontology , pathology
Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled‐up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.