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Directed Self‐Assembly with Sub‐100 Degrees Celsius Processing Temperature, Sub‐10 Nanometer Resolution, and Sub‐1 Minute Assembly Time
Author(s) -
Park Woon Ik,
Kim Kyungho,
Jang HyunIk,
Jeong Jae Won,
Kim Jong Min,
Choi Jaesuk,
Park Jae Hong,
Jung Yeon Sik
Publication year - 2012
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201201407
Subject(s) - degree celsius , annealing (glass) , nanometre , materials science , self assembly , copolymer , nanoscopic scale , resolution (logic) , nanotechnology , solvent , analytical chemistry (journal) , thermodynamics , chemistry , composite material , physics , chromatography , computer science , organic chemistry , polymer , artificial intelligence
The synergetic combination of low‐temperature thermal assistance with solvent annealing for the self‐assembly of block copolymers with a large Flory‐Huggins interaction parameter simultaneously achieves sub‐10 nm resolution and sub‐1 minute annealing time. It is shown that this method is applicable to different geometries of patterns such as nanoscale dots, lines, and holes.