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Graphene Metrology: Centimeter‐Scale High‐Resolution Metrology of Entire CVD‐Grown Graphene Sheets (Small 18/2011)
Author(s) -
Kyle Jennifer Reiber,
Guvenc Ali,
Wang Wei,
Ghazinejad Maziar,
Lin Jian,
Guo Shirui,
Ozkan Cengiz S.,
Ozkan Mihrimah
Publication year - 2011
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201190068
Subject(s) - graphene , materials science , metrology , chemical vapor deposition , quenching (fluorescence) , fluorescence , nanotechnology , optoelectronics , optics , physics
The image shows the segmented fluorescence quenching microscopy image of a large‐area graphene sample fabricated via chemical vapor deposition. This new metrology technique allows identification of graphene layers over a large area by utilizing the fact that graphene quenches fluorescence through resonant energy transfer. Fluorescence quenching is visualized by spin‐coating a dye‐polymer mixture over the graphene sample. Fluorescence quenching contrast is controlled by setting the dye layer thickness. For few‐layer graphene characterization, a 30‐nm‐thick dye layer is used. Once the fluorescence image is collected, histogram‐based segmentation is used to identify individual graphene layers. This metrology technique is well suited for many industrial applications.

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