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3D Nanofabrication: Nanoscale Origami for 3D Optics (Small 14/2011)
Author(s) -
Cho JeongHyun,
Keung Michael D.,
Verellen Niels,
Lagae Liesbet,
Moshchalkov Victor V.,
Van Dorpe Pol,
Gracias David H.
Publication year - 2011
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201190049
Subject(s) - nanoscopic scale , nanolithography , materials science , planar , nanotechnology , etching (microfabrication) , resonator , dielectric , metamaterial , nanophotonics , optoelectronics , optics , computer science , physics , fabrication , layer (electronics) , medicine , alternative medicine , pathology , computer graphics (images)
The cover image shows 500 nm scaled dielectric cubes with precise metal patterns (50 nm line width) including functional optical elements such as split‐ring resonators (SRRs) on all faces. The cubes fold up spontaneously during the plasma etching of electron‐beampatterned panels. This self‐folding enables origami‐inspired approaches to be extended to the nanoscale, allowing precisely patterned 3D structures to be self‐assembled from flat (2D) panels in a parallel manner. Compared to planar patterns, arrangements of optically active elements in polyhedral geometries can augment functionality for optics and biosensing. For more information, please read the Communication “Nanoscale Origami for 3D Optics” by D. H. Gracias and co‐workers, beginning on page 1943 .