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A Portable, Benchtop Photolithography System Based on a Solid‐State Light Source
Author(s) -
Huntington Mark D.,
Odom Teri W.
Publication year - 2011
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201101209
Subject(s) - photolithography , microscale chemistry , light emitting diode , solid state , nanotechnology , computer science , solid state lighting , materials science , lithography , optoelectronics , diode , computational lithography , light source , engineering physics , optics , engineering , physics , multiple patterning , mathematics , resist , mathematics education , layer (electronics)
A portable and compact photolithography system based on a solid‐state light source of UV light‐emitting diodes (LEDs) is described. Solid‐state photolithography can achieve high‐quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.