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Easy Fabrication of Electrically Insulating Nanogaps by Transfer Printing
Author(s) -
Fakhr Omar,
Altpeter Philipp,
Karrai Khaled,
Lugli Paolo
Publication year - 2011
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201100413
Subject(s) - polydimethylsiloxane , fabrication , materials science , transfer printing , substrate (aquarium) , nanotechnology , electrode , silicon , pdms stamp , optoelectronics , composite material , chemistry , medicine , oceanography , alternative medicine , pathology , geology
An easy and cost‐effective method to reproducibly fabricate nanogaps over a large area is introduced. Gold is evaporated on low‐aspect‐ratio polydimethylsiloxane (PDMS) stamps at an angle of 60°. Afterwards, the stamp is brought into contact with a silicon/silicon dioxide substrate and subsequently peeled at rates varying from 1 to 3 mm s −1 , resulting in the fabrication of nanogaps between two gold electrodes. The fabrication of insulating nanogaps with a width down to 50 nm is demonstrated.