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Directed Fracture for the Fabrication of Free‐Standing Multilayered Submicrometer Structures
Author(s) -
Robaina Roberto R.,
LópezMartínez María José,
Esteve Jaume,
PerezCastillejos Raquel,
Plaza José Antonio
Publication year - 2011
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201001105
Subject(s) - fabrication , materials science , nanotechnology , fracture (geology) , composite material , medicine , alternative medicine , pathology
Microdevices are fractured at specific sites to fabricate free‐standing multilayered submicrometer structures, which consist of the microdevice cross sections that become exposed after fracture. As determined by finite‐element modeling, the microdevices feature a fracturing point where stress concentrates under applied pulling forces. The structures fabricated here have a core of phosphosilicate glass surrounded by a layer of polycrystalline silicon.