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Bioinspired Parabola Subwavelength Structures for Improved Broadband Antireflection
Author(s) -
Song Young Min,
Jang Sung Jun,
Yu Jae Su,
Lee Yong Tak
Publication year - 2010
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.201000079
Subject(s) - materials science , parabola , photoresist , optics , lithography , interference lithography , interference (communication) , wavelength , optoelectronics , broadband , photolithography , photomask , thermal , plasmon , fabrication , resist , nanotechnology , physics , telecommunications , layer (electronics) , medicine , channel (broadcasting) , alternative medicine , pathology , computer science , meteorology
Subwavelength structures (SWSs) with a parabola shape are fabricated by a combination of laser interference lithography of a photoresist (PR), thermal reflow, and subsequent pattern transfer. The SWSs show antireflection properties in a broader wavelength range than conventional cone‐shaped SWSs, and have potential in optoelectronics for improved device performance.