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Fabrication of Monolithic Bridge Structures by Vacuum‐Assisted Capillary‐Force Lithography
Author(s) -
Kwak Rhokyun,
Jeong Hoon Eui,
Suh Kahp Y.
Publication year - 2009
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200900219
Subject(s) - fabrication , lithography , bridging (networking) , materials science , capillary action , nanotechnology , nanoscopic scale , microstructure , bridge (graph theory) , curing (chemistry) , composite material , optoelectronics , computer science , medicine , computer network , alternative medicine , pathology
Bridging the gap : Vacuum‐assisted capillary force lithography (CFL) allows the fabrication of monolithic, suspended bridge structures (see picture) by exploiting partial curing kinetics and vacuum‐assisted hydraulic filling. A small portion of the base microstructure (<4 µm) is molded to create a bridge structure by simply applying a nanoscale mold with the impression of channels, meshes, or circles.