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Fabrication of Polymeric Nanorods Using Bilayer Nanoimprint Lithography
Author(s) -
Buyukserin Fatih,
Aryal Mukti,
Gao Jinming,
Hu Wenchuang
Publication year - 2009
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200801822
Subject(s) - nanoimprint lithography , nanorod , materials science , fabrication , nanotechnology , bilayer , nanolithography , lithography , optoelectronics , membrane , chemistry , medicine , biochemistry , alternative medicine , pathology
A bilayer nanoimprint lithography method is presented for the fabrication of nanorods (see image) with precisely controllable dimensions. The uniqueness of this method stems from the bilayer polymer design and development of low‐cost, large‐area nanoporous Si molds.