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Cobalt Nanoparticle Arrays made by Templated Solid‐State Dewetting
Author(s) -
Oh YongJun,
Ross Caroline A.,
Jung Yeon Sik,
Wang Yang,
Thompson Carl V.
Publication year - 2009
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200801433
Subject(s) - dewetting , materials science , annealing (glass) , nanoparticle , cobalt , nanotechnology , silicon , chemical engineering , thin film , particle size , crystallography , composite material , optoelectronics , metallurgy , chemistry , engineering
Abstract Self‐assembled cobalt particle arrays are formed by annealing, which cause agglomeration (dewetting) of thin Co films on oxidized silicon substrates that are topographically prepatterned with an array of 200‐nm‐period pits. The Co nanoparticle size and uniformity are related to the initial film thickness, annealing temperature, and template geometry. One particle per 200‐nm‐period pit is formed from a 15‐nm film annealed at 850 °C; on a smooth substrate, the same annealing process forms particles with an average interparticle distance of 200 nm. Laser annealing enables templated dewetting of 5‐nm‐thick films to give one particle per pit. Although the as‐deposited films exhibit a mixture of hexagonal close‐packed and face‐centered cubic (fcc) phases, the ordered cobalt particles are predominantly twinned fcc crystals with weak magnetic anisotropy. Templated dewetting is shown to provide a method for forming arrays of nanoparticles with well‐controlled sizes and positions.