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Periodic Large‐Area Metallic Split‐Ring Resonator Metamaterial Fabrication Based on Shadow Nanosphere Lithography
Author(s) -
Gwinner Michael Christian,
Koroknay Elisabeth,
Fu Liwei,
Patoka Piotr,
Kandulski Witold,
Giersig Michael,
Giessen Harald
Publication year - 2009
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200800923
Subject(s) - materials science , metamaterial , fabrication , nanosphere lithography , shadow mask , split ring resonator , lithography , optics , resonator , monolayer , polystyrene , optoelectronics , photolithography , nanotechnology , polymer , physics , composite material , medicine , alternative medicine , pathology
Abstract A fast and cheap, large‐area (>1 cm 2 ), high‐coverage fabrication technique for periodic metallic split‐ring resonator metamaterials is presented, which allows control of inner‐ and outer‐ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted‐angle‐rotation thermal evaporation onto Langmuir–Blodgett‐type monolayers of close‐packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.