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CMOS‐Compatible Nanowire Sensor Arrays for Detection of Cellular Bioelectricity
Author(s) -
Pui TzeSian,
Agarwal Ajay,
Ye Feng,
Balasubramanian Narayanan,
Chen Peng
Publication year - 2009
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200800919
Subject(s) - cmos , nanowire , nanotechnology , computer science , throughput , key (lock) , materials science , sensitivity (control systems) , optoelectronics , electronic engineering , telecommunications , engineering , wireless , operating system
Perfectly aligned arrays of long silicon nanowires fabricated using a top–down complementary metal oxide semiconductor (CMOS) compatible approach and their ability for real‐time extracellular recording of cellular bioelectricity are presented. The technique enables noninvasive, high‐sensitivity, high‐throughput, long‐term electrophysiology measurements at the single‐cell level or from tissues.