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Biomimetic Antireflective Si Nanopillar Arrays
Author(s) -
Xu Hongbo,
Lu Nan,
Qi Dianpeng,
Hao Juanyuan,
Gao Liguo,
Zhang Bo,
Chi Lifeng
Publication year - 2008
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200800282
Subject(s) - nanopillar , anti reflective coating , materials science , nanotechnology , etching (microfabrication) , monolayer , computer science , optoelectronics , nanostructure , layer (electronics)
Biomimetic antireflective Si nanopillar arrays are created using self‐assembled polymer‐sphere monolayers as etching masks (see image). These tapered Si nanopillar arrays can greatly suppress the reflectivity of Si. This method provides a facile approach for producing antireflection (AR) surfaces on large areas with low cost and high throughput.