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Fabrication of Large‐Scale Patterned Gold‐Nanopillar Arrays on a Silicon Substrate Using Imprinted Porous Alumina Templates
Author(s) -
Wolfrum Bernhard,
Mourzina Yulia,
Mayer Dirk,
Schwaab Daniel,
Offenhäusser Andreas
Publication year - 2006
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200600311
Subject(s) - nanopillar , materials science , nanotechnology , template , nanoporous , fabrication , substrate (aquarium) , silicon , anodizing , photolithography , wafer , aluminium , optoelectronics , nanostructure , composite material , medicine , oceanography , alternative medicine , pathology , geology
Gold‐nanopillar arrays are patterned at predefined positions on a silicon substrate (see figure; scale bar=600 nm). The technique is based on the electrodeposition of gold into nanoporous alumina templates. Prior to anodization the thin aluminum film is indented via an imprinting procedure to define the spots for nanopillar growth. This technique facilitates versatile patterning of metal‐nanopillar arrays below the resolution limit of conventional photolithography.