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Cicada Wings: A Stamp from Nature for Nanoimprint Lithography
Author(s) -
Zhang Guoming,
Zhang Jin,
Xie Guoyong,
Liu Zhongfan,
Shao Huibo
Publication year - 2006
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200600255
Subject(s) - nanoimprint lithography , pillar , nanotechnology , substrate (aquarium) , lithography , hexagonal crystal system , materials science , nanostructure , silicon , pdms stamp , natural materials , soft lithography , etching (microfabrication) , nanolithography , fabrication , optoelectronics , polymer science , chemistry , biology , ecology , crystallography , engineering , layer (electronics) , mechanical engineering , medicine , alternative medicine , pathology
Winging it: The natural micro‐ and nanostructures that exist on the wings of cicadas (see image) are used as a new type of nanoimprinting lithography (NIL) stamp. NIL is used to fabricate nanowell arrays and the structures are transferred to a silicon substrate by reactive ion etching. Patterned PMMA (poly(methyl methacrylate)) is also used as a mold to fabricate hexagonal gold pillar arrays that mimick structures on cicada wings. This work demonstrates the use of natural nanostructures as a much cheaper NIL method as cicada wings are abundant and easy to obtain.