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SiC‐Shell Nanostructures Fabricated by Replicating ZnO Nano‐objects: A Technique for Producing Hollow Nanostructures of Desired Shape
Author(s) -
Zhou Jun,
Liu Jin,
Yang Rusen,
Lao Changshi,
Gao Puxian,
Tummala Rao,
Xu Ning Sheng,
Wang Zhong Lin
Publication year - 2006
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200600098
Subject(s) - template , nanostructure , materials science , nanotechnology , nanofluidics , chemical vapor deposition , shell (structure) , replica , nano , plasma enhanced chemical vapor deposition , drug delivery , composite material , art , visual arts
Shelling out: A replica technique is demonstrated for fabricating hollow SiC nanostructures of any shape (see figure) as defined by templates of pregrown ZnO nanostructure templates. The technique is based on plasma‐enhanced chemical vapour deposition (PECVD) at a temperature of ≈250–300 °C. The SiC‐shell nanostructures have potential applications as catalysts, in drug delivery, and nanofluidics.