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Novel Ultrananocrystalline Diamond Probes for High‐Resolution Low‐Wear Nanolithographic Techniques
Author(s) -
Kim KeunHo,
Moldovan Nicolaie,
Ke Changhong,
Espinosa Horacio D.,
Xiao Xingcheng,
Carlisle John A.,
Auciello Orlando
Publication year - 2005
Publication title -
small
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.785
H-Index - 236
eISSN - 1613-6829
pISSN - 1613-6810
DOI - 10.1002/smll.200500028
Subject(s) - materials science , diamond , microfabrication , nanotechnology , nanolithography , fabrication , silicon , electroforming , etching (microfabrication) , substrate (aquarium) , nanomanufacturing , diamond tool , optoelectronics , composite material , diamond turning , medicine , oceanography , alternative medicine , pathology , layer (electronics) , geology
A hard, low‐wear probe for contact‐mode writing techniques, such as dip‐pen nanolithography (DPN), was fabricated using ultrananocrystalline diamond (UNCD). Molding within anisotropically etched and oxidized pyramidal pits in silicon was used to obtain diamond tips with radii down to 30 nm through growth of UNCD films followed by selective etching of the silicon template substrate. The probes were monolithically integrated with diamond cantilevers and subsequently integrated into a chip body obtained by metal electroforming. The probes were characterized in terms of their mechanical properties, wear, and atomic force microscopy imaging capabilities. The developed probes performed exceptionally well in DPN molecular writing/imaging mode. Furthermore, the integration of UNCD films with appropriate substrates and the use of directed microfabrication techniques are particularly suitable for fabrication of one‐ and two‐dimensional arrays of probes that can be used for massive parallel fabrication of nanostructures by the DPN method.

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